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Computer-Aided Engineering of Semiconductor Integrated Circuits (1979)

Defense Technical Information Center · leaf 124

An illustration from Computer-Aided Engineering of Semiconductor Integrated Circuits, 1979, leaf 124
(a) (b) Fig. 2.21. Comparison of case C arsenic experimental normalized linear rate constant to calculated values at (a) 750°C and (b) 850#C. 8

Meindl, J D · Stanford univ ca integrated circuits lab · Computer aided design · Integrated circuits · Semiconductor devices · Computer applications · Doping · Engineering · Fabrication · Ion implantation · Low costs · Measurement · Military applications · Oxidation · Physical properties · Silicon · Thermal properties · Vapor deposition

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