Computer-Aided Engineering of Semiconductor Integrated Circuits (1979)
Defense Technical Information Center · leaf 9
s a detailed development of research results In developing computer-aids for modeling the IC fabrication process. The effort Is vertically Integrated as described in Figure 1 and the outcome Is the widely distributed SUPREM program. Moreover device analysis capabilities have been developed based on… … Figure 1 VERTICAL INTEGRATION AND INDUSTRIAL COUPLING OF RESEARCH PROGRAM « 3
