Coordinated Research in Robotics and Integrated Manufacturing (1983)
Defense Technical Information Center · leaf 65
Figure 3 .2 .2 .3 View from the Back Side of the Wafer of Windows for a Thermopile Infrared Line Imager. The dielectric windows have dimensions of 0.4 x 0.8mm with a surrounding rim of boron-doped silicon. The windows are formed using selective an¬ isotropic etching. processing has occurred,…
Atkins,D E · Michigan univ ann arbor robot systems div · Robots · Robotics · Integrated systems · Production control · Manufacturing · Repair · Spare parts · Replacement · Computer aided design · Machine tools
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