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Computer-Aided Engineering of Semiconductor Integrated Circuits (1979)

Defense Technical Information Center · leaf 216

An illustration from Computer-Aided Engineering of Semiconductor Integrated Circuits, 1979, leaf 216
Fig. 3.13. Experimental arrangement. Substrates of (111) and (100) orienta¬ tions were alternately placed on the susceptor. The arrow Indicates the direction of gas flow.

Meindl, J D · Stanford univ ca integrated circuits lab · Computer aided design · Integrated circuits · Semiconductor devices · Computer applications · Doping · Engineering · Fabrication · Ion implantation · Low costs · Measurement · Military applications · Oxidation · Physical properties · Silicon · Thermal properties · Vapor deposition

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