Inside Out Library
Computer-Aided Engineering of Semiconductor Integrated Circuits (1979)
Defense Technical Information Center · leaf 228
Fig. 3.25. SEM and optical photographs of A1/WS12/S102/S1 films annealedMeindl, J D · Stanford univ ca integrated circuits lab · Computer aided design · Integrated circuits · Semiconductor devices · Computer applications · Doping · Engineering · Fabrication · Ion implantation · Low costs · Measurement · Military applications · Oxidation · Physical properties · Silicon · Thermal properties · Vapor deposition
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